Ukuqonda iTekhnoloji yeFilimu encinci
Itekhnoloji yefilim encinci ibandakanya ukubeka iileya ezibhityileyo zemathiriyeli (ngokuqhelekileyo ukusuka kwiinanometers ezimbalwa ukuya kwiimicrometers ezimbalwa ubukhulu) kwi-substrate. Ezi maleko zingenziwa ngesinyithi, i-semiconductors, i-insulators, okanye ezinye izinto, kwaye zisetyenziselwa ukudala izixhobo ze-elektroniki ezisebenzayo. Le teknoloji ibaluleke kakhulu ekwenzeni izixhobo zombane njengoko ivumela ukuchaneka okuphezulu kunye nokusebenza kwamacandelo. I-Thin-film deposition yenziwa nge-physical vapor deposition (PVD) okanye i-chemical vapor deposition (CVD), iqinisekisa umgangatho kunye nokusebenza kwemveliso yokugqibela.
Uphuhliso lwetekhnoloji yefilimu ecekethekileyo yaqala phakathi kwinkulungwane yama-20 xa kwenziwa inkqubela ebonakalayo kwinzululwazi yezinto eziphathekayo kunye nobuchule bokufaka ivacuum. Ekuqaleni, itekhnoloji yefilimu encinci yayisetyenziswa ikakhulu kwishishini le-semiconductor ukwenza iitransistors kunye neesekethe ezidibeneyo. Njengoko itekhnoloji ihambela phambili kwaye imfuno isanda, uluhlu lwezicelo zetekhnoloji yefilimu encinci yanda ngokukhawuleza. Namhlanje, isetyenziswa ngokubanzi kwimveliso yenzwa, i-optical coatings, iiseli zelanga, ii-hard disk drives, kunye ne-anti-corrosion coatings, phakathi kwabanye. Ngokomzekelo, ekuveliseni i-sensor, iteknoloji yefilimu encinci isetyenziselwa ukuvelisa izinzwa zoxinzelelo, izinzwa zegesi, kunye nezinzwa zeqondo lokushisa, ezibonakaliswe ngovakalelo oluphezulu kunye nokuchaneka. Ukongezelela, ukusetyenziswa kwetheknoloji yefilimu encinci kwiinkqubo ze-microelectromechanical (MEMS) kunye ne-nanotechnology nayo ikhula, inika inkxaso ebalulekileyo kwizinto ezintsha kunye nophuhliso kule mimandla.
Iimpawu eziphambili zetekhnoloji yefilimu encinci ibandakanya ukuchaneka kwayo okuphezulu, ukuguquguquka, kunye nekhono lokudibanisa imisebenzi emininzi. Ukuchaneka okuphezulu kuvumela itekhnoloji yefilimu ecekethekileyo ukuba ifikelele kwimilinganiselo echanekileyo ngaphakathi koluhlu lobungakanani obuncinci, obubalulekileyo kwizixhobo ezifana nezinzwa zoxinzelelo ezifuna ukugcina imilinganiselo yoxinzelelo echanekileyo phantsi kweemeko ezahlukeneyo zokusingqongileyo. Ukuguquguquka kweefilimu ezinqabileyo zivumela ukuba zilungelelanise ii-substrates ezahlukeneyo kunye neemfuno zesicelo, zivumela ukubekwa kwii-substrates ezahlukeneyo ezifana ne-silicon, iglasi, isinyithi, kunye neeplastiki, ngaloo ndlela kufezekiswa imisebenzi emininzi. Ngaphezu koko, itekhnoloji yefilimu encinci inokudityaniswa nobunye ubugcisa kunye nezixhobo zokwenza izixhobo ezidibeneyo ezinemisebenzi emininzi. Umzekelo, ukudibanisa itekhnoloji yefilimu encinci kunye ne-MEMS inokuvelisa izinzwa zoxinzelelo ezincinci ezingencinci kwaye zikhaphukhaphu kuphela kodwa zinovakalelo kakhulu kwaye zithembekile.
Itekhnoloji yefilimu encinci inokudibanisa imisebenzi emininzi kwisixhobo esinye, oku kuthetha ukuba ukuva, ukulinganisa, kunye nokusetyenzwa kwedatha kunokufezekiswa ngaxeshanye ngaphakathi komgangatho wefilimu ebhityileyo, ukwenza lula uyilo kunye nenkqubo yokwenziwa kwesixhobo. Oku kukwazi ukudibanisa akuphuculi kuphela ukusebenza kwesixhobo kunye nokuthembeka kodwa kunciphisa iindleko zokuvelisa kunye nobunzima. Kuphuhliso lwezinzwa zoxinzelelo, itekhnoloji yefilimu encinci inokuphucula kakhulu ukusebenza kwenzwa, ivumela ukuba basebenze ngokuzinzileyo kwiindawo ezahlukeneyo ezinzima.
Ukudityaniswa kweTekhnoloji yeFilimu encinci kwiiSensors zoxinzelelo
Ukudityaniswa kwetekhnoloji yefilimu encinci kwiinzwa zoxinzelelo zijolise ekuphuculeni ukusebenza, ukunciphisa ubungakanani, kunye nokwandisa ubuntununtunu. Ngokulawula ngokuchanekileyo iipropathi zezinto kunye nobukhulu bomaleko, itekhnoloji yefilimu encinci yenza ukuba uphuhliso lwezinzwa ezichanekileyo zinokwenzeka. Oku kudityaniswa akuphuculi kuphela ukusebenza ngokubanzi kweenzwa kodwa kuzisa iingenelo ezibalulekileyo kwimiba emininzi ebalulekileyo.
Okokuqala, itekhnoloji yefilimu encinci yenza i-miniaturization yeenzwa. Abenzi boxinzelelo bemveli bahlala bejongana nemida kubungakanani kunye nobunzima, ngelixa itekhnoloji yefilimu encinci ivumela ukwenziwa kwezinto ezincinci, ezilula ngaphandle kokuphazamisa ukusebenza. Oku kubaluleke ngakumbi kwizicelo ezinendawo encinci okanye ezifuna izisombululo ezikhaphukhaphu, njengezixhobo zonyango kunye ne-MEMS.
Okwesibini, izinzwa zefilim ezincinci zigqwesa ekwandiseni ubuntununtunu. Itekhnoloji yefilimu encinci inokubona utshintsho loxinzelelo lwemizuzu ngokuchaneka okuphezulu, ukwenza ezi zivamvo zibe luncedo kwiindawo ezifuna imilinganiselo echanekileyo. Ngokomzekelo, kwi-automation ye-industrial automation kunye nokubeka iliso kokusingqongileyo, i-sensors ye-fin-film-pressure sensors inokubonelela ngedatha echanekileyo, ngaloo ndlela iphucula ukusebenza kakuhle kwenkqubo kunye nokuthembeka.
Ngaphezu koko, itekhnoloji yefilimu encinci iphucula ukuthembeka kunye nokuqina kweenzwa zoxinzelelo. Ukufana okuphezulu kunye nokuzinza kweengqimba zefilimu ezincinci ziqinisekisa ukusebenza okuhambelanayo ngokusetyenziswa kwexesha elide. Xa kuthelekiswa nezinzwa zemveli, iisensonsi zefilimu ezibhityileyo zinokugcina ukusebenza kakuhle naphantsi kweemeko zokusingqongileyo ezigqithisileyo, zibenze basebenze ngokubanzi kwiinkalo ezifana ne-aerospace kunye nemizi-mveliso yeemoto.
Xa kuthelekiswa neendlela zesiNtu, itekhnoloji yefilimu encinci ibonelela ngokulula, ukubumbana, kunye nolunye olunovakalelo oluphezulu. Izivamvo zoxinzelelo zemveli zihlala zijongana nocelomngeni kubungakanani, ubunzima, kunye nokuchaneka, ngelixa itekhnoloji yefilimu encinci, kunye neempawu zayo eziphezulu kunye neenkqubo zokuvelisa, iyoyisa le mida. I-Thin-film sensors ayinayo inzuzo kuphela ngobukhulu kunye nobunzima kodwa iphinda igqithise ngokuphawulekayo iinzwa zemveli ngokuchaneka kunye novakalelo. Ezi zibonelelo zenza itekhnoloji yefilimu encinci ibe yinxalenye ebalulekileyo yophuhliso lwetekhnoloji yale mihla.
Izixhobo ze-Thin-Film Pressure Sensors
Ukukhethwa kwezixhobo ze-sensors ze-thin-film zoxinzelelo zibalulekile njengoko ezi zixhobo zichaphazela ngokuthe ngqo ukusebenza kunye nokuthembeka kweenzwa.
Izinto eziqhelekileyo
Izinto eziqhelekileyo ezisetyenziswa kwiisensom zoxinzelelo lwefilim ezibhityileyo ziquka iintsimbi ezifana negolide, iplatinam, kunye ne-aluminiyam, ezaziwa ngokusebenza kwazo okugqwesileyo kunye nokumelana nomhlwa. Igolide, njengento eqhuba kakhulu, isetyenziswa rhoqo kwiindawo ze-electrode zenzwa zokuqinisekisa ukuchaneka kunye nokuzinza kokudluliselwa kwesignali. IPlatinam, ngenxa yokuzinza kwayo okuhle kakhulu kwe-thermal kunye nokumelana ne-oxidation, isetyenziswa ngokubanzi kwi-sensors kwiindawo eziphezulu zokushisa. I-Aluminiyam, ilula kwaye ine-conductivity elungileyo, isetyenziswa ngokuqhelekileyo kwizicelo zenzwa ezifuna ukulawula ubunzima. Ukongezelela, izixhobo ze-semiconductor ezifana ne-silicon kunye ne-germanium zisetyenziswa ngokubanzi kwi-sensors ye-filimi encinci yoxinzelelo ngenxa yeempawu zabo ezintle kunye novakalelo, zidlala indima ebaluleke kakhulu kwi-MEMS.
Izinto eziphucukileyo
Ngophuhliso lwetekhnoloji, izixhobo eziphambili ezifana ne-nanocomposites kunye negraphene zifumana ingqwalasela eyongeziweyo kwisicelo sazo kwiinzwa zoxinzelelo lwefilimu. Ezi zixhobo ziphandwa ngokubanzi kwiipropathi zazo ezigqwesileyo kunye nokubanakho ukwandisa ukusebenza kwenzwa. I-Nanocomposites idibanisa iingenelo zezixhobo ezahlukeneyo, inika amandla aphezulu omatshini kunye ne-conductivity, enokuphucula kakhulu uvakalelo lwenzwa kunye nokuqina. I-Graphene, kunye nesakhiwo sayo se-athomu enye kunye neempawu zombane ezibalaseleyo, zithathwa njengokhetho olufanelekileyo lwezinto ezizayo zenzwa. Ayinayo kuphela i-ultra-high conductivity kodwa ikwabonisa amandla abalaseleyo omatshini kunye nokunwebeka, ebonisa amandla amakhulu ekuphuhliseni i-ultra-sensitive sensors pressure.
Iimpahla zeMathiriyeli
Ukukhethwa kwezixhobo ze-sensors ze-thin-film zoxinzelelo zisekelwe kwiipropati zabo zombane, oomatshini, kunye ne-thermal ukuqinisekisa ukusebenza kakuhle phantsi kweemeko ezahlukeneyo zokusebenza. Ngokomzekelo, abenzi boluvo abasetyenziswa kwiindawo ezinobushushu obuphezulu bafuna izinto ezizinzo ngokugqwesileyo kwe-thermal kunye nokumelana ne-oxidation, ngelixa izicelo ezifuna uvakalelo oluphezulu ziqwalasela i-conductivity yombane kunye ne-mechanical elasticity modulus yezinto. Ngokuqwalasela ngokubanzi ezi zixhobo eziphathekayo, abaqulunqi banokukhetha ezona zinto zifanelekileyo kwiimfuno ezithile zesicelo, ukuqinisekisa ukuthembeka kunye nokuchaneka kweenzwa kwiindawo ezahlukeneyo eziyinkimbinkimbi.
Iingqwalasela zoYilo kwiiSensors zoxinzelelo lweFilimu eThin
Iingqwalasela zokuyila kwii-sensors zoxinzelelo zefilimu ezincinci zijolise ekuqinisekiseni ukusebenza kwazo, ukuthembeka, kunye nokuzinza kwizicelo ezahlukeneyo.
Uyilo loLwakhiwo
Uyilo lwesakhiwo se-thin-film i-sensors yoxinzelelo kufuneka iqinisekise ukuzinza komatshini kunye nokomelela ngelixa ugcina uvakalelo kunye nokuchaneka. Oku kufuna ukuba abaqulunqi baqwalasele kuphela iimpawu ezibonakalayo zefilimu encinci kodwa kunye nomthwalo womatshini kunye noxinzelelo lwendalo kwizicelo zangempela. Uyilo lolwakhiwo lwe-sensor kufuneka lumelane noxinzelelo oluhlukeneyo lomatshini kunye notshintsho lwendalo ngelixa ugcina uphawu oluzinzileyo lwemveliso.
Uvakalelo
Uvakalelo yinto ephambili kuyilo lwezinzwa zoxinzelelo, eziphenjelelwa kukukhethwa kwezinto, ubukhulu befilimu encinci, kunye neteknoloji yokuvelisa. Abenzi boluvo oluphezulu banokubona utshintsho loxinzelelo lwemizuzu, lubalulekile kumlinganiselo ochanekileyo kunye nolawulo lwezicelo. Ukukhethwa kwezinto eziphathekayo kuchaphazela ngokuthe ngqo uvakalelo loluvo; izinto ezahlukeneyo zineepropati ezahlukeneyo zoomatshini kunye nombane, ezifanelekileyo kwiimfuno ezahlukeneyo zesicelo. Ubungqingqwa befilimu encinci bukwayinto ebalulekileyo; okukhona ifilimu ibhityile, kokukhona uvakalelo luphezulu, kodwa oku kunokunciphisa amandla omatshini, kufuna ulungelelwaniso phakathi kovakalelo kunye namandla.
Ukuchaneka nokuchaneka
Ukufezekisa ukuchaneka okuphezulu kunye nokuchaneka kwi-sensors yoxinzelelo lwefilimu encinci kufuna ukuyila ngokucophelela kunye neenkqubo zokuvelisa ukuqinisekisa ukuthembeka komlinganiselo kunye nokuphindaphinda. Oku kubandakanya ngokuchanekileyo ukulawula ubukhulu kunye nokufana kwefilimu encinci, ukukhetha ama-substrates afanelekileyo, kunye nokuphucula iinkqubo zokuvelisa. Nakuphi na ukuphambuka okuncinci kwinkqubo yokuvelisa kunokuchaphazela ukusebenza kwenzwa, ukwenza ulawulo olungqongqo kunye novavanyo oluyimfuneko.
Iimpawu zoMsebenzi Ixesha lokuphendula
Izinzwa zoxinzelelo lwefilim ezincinci zihlala zinexesha lokuphendula ngokukhawuleza, kubalulekile kwizicelo eziguquguqukayo ezifuna ukujongwa koxinzelelo lwexesha lokwenyani. Ixesha lokuphendula ngokukhawuleza liqinisekisa ukuba inzwa inokubamba ngokukhawuleza utshintsho loxinzelelo, ukubonelela ngenkxaso yedatha yexesha langempela kwizicelo kwiinkalo ezifana ne-industrial automation, izixhobo zonyango kunye ne-aerospace.
Ukuqina
Ukukhetha izixhobo ezifanelekileyo kunye nokusetyenziswa kobuchule bokuvelisa obuthembekileyo kwandisa ukuqina kweenzwa zoxinzelelo lwefilimu, ukuqinisekisa ukuthembeka kwexesha elide. Ukuqina kubalulekile ekusebenzeni okuzinzile kwexesha elide kwezinzwa, ngakumbi ezo zisebenza phantsi kweemeko ezirhabaxa zokusingqongileyo, ezinje ngamaqondo obushushu aphezulu, ukufuma okuphezulu, okanye indawo ezonakalisayo.
Uzinzo lokusiNgqongileyo
I-Thin-film i-sensors zoxinzelelo kufuneka zigcine ukusebenza okuhambelanayo phantsi kweemeko ezahlukeneyo zokusingqongileyo, kubandakanywa ukuguquguquka kobushushu, ukufuma, kunye noxinzelelo lomatshini. Oku kufuna ukuba abenzi boluvo babe nokuzinza okuhle kokusingqongileyo, bakwazi ukusebenza ngaphakathi koluhlu olubanzi lobushushu, kwaye bangabi naluvelwano kwiinguqu zokufuma kunye noxinzelelo lomatshini. Ukukhethwa kwezinto eziphathekayo kunye noyilo lokupakisha ludlala indima ebalulekileyo ekuqinisekiseni ukuzinza kokusingqongileyo kweenzwa.
Ukusetyenziswa kweeSensors zoxinzelelo lwefilimu eNcinci
Kwimizi-mveliso yeemoto, i-sensors ye-thin-film i-pressure sensors isetyenziselwa kwiinkqubo zokujonga uxinzelelo lwesondo (TPMS) ukubonelela ngedatha yexesha langempela loxinzelelo lwesondo, ukuphucula ukhuseleko kunye nokusebenza. Kwiinkqubo zolawulo lwe-injini, ezi zivavanyi zibeka iliso kumafutha kunye noxinzelelo lomoya, ziqinisekisa ukusebenza kakuhle kwe-injini kunye nokusebenza kakuhle. Ukongeza, iinkqubo zokhuseleko lweemoto ezinjengeengxowa zomoya kunye neenkqubo zokuqhobosha zixhomekeke kwiisensom zoxinzelelo lwefilim ezincinci zomlinganiselo woxinzelelo oluchanekileyo kunye nokusebenza ngexesha elifanelekileyo.
Kwicandelo lezonyango, ii-sensors ze-thin-film-pressure sensors zisetyenziswa kwiimonitha zoxinzelelo lwegazi, ukubonelela ngemilinganiselo echanekileyo kunye neyokungathinteliyo ebalulekileyo ekunyamekelweni kwesigulane kunye nokuxilongwa. Zikwasetyenziswa kwii-sensor ezifakwe kwi-implantable monitoring physiological monitoring, ukuphucula iziphumo zonyango lwesigulane. Izixhobo zonyango ezinxitywayo, ezifana neetraki zokuqina komzimba kunye nabahloli bezempilo, zisebenzisa ezi zivamvo ukulandelela iimpawu ezibalulekileyo kunye nemisebenzi yomzimba.
Kwicandelo le-aerospace, i-sensors ye-fin-film yoxinzelelo lwefilimu isetyenziselwa ukubeka iliso kwi-cabin pressure, iqinisekisa uxinzelelo oluphezulu lwekhabhinethi yokuthuthuzela abakhweli kunye nokhuseleko. Zikwasetyenziselwa ukujongwa kwezempilo, ezikwaziyo ukufumanisa imiba enokubakho ngaphambi kokuba ibe mandundu. Ngaphezu koko, ezi zivamvo zibalulekile kwiinkqubo zolawulo lwendawo yesiphekepheke, ziqinisekisa iimeko ezizinzileyo zabasebenzi kunye nezixhobo.
Kwizicelo zoshishino, i-sensors yoxinzelelo lwefilimu encinci isetyenziselwa ukulawula inkqubo echanekileyo, ukuqinisekisa ukusebenza kakuhle kunye nokusebenza kakuhle. Iinkqubo zerobhothi zithembele kwezi nzwakazi ngempendulo ebambekayo kunye nokuziva uxinzelelo, ukuphucula ukusebenza kunye nobuchule babo. Iinkqubo zokhuseleko lwamashishini zikwasebenzisa izinzwa zoxinzelelo zefilimu ezibhityileyo ukuze zibone kwaye ziphendule kutshintsho loxinzelelo, ukuthintela iingozi kunye nokuqinisekisa ukhuseleko lwabasebenzi.
Imibuzo ebuzwa qho
Ziziphi iingenelo eziphambili zeenzwa zoxinzelelo lwefilimu encinci?
Izinzwa zoxinzelelo lwefilimu encinci zibonelela ngobuntununtunu obuphezulu, i-miniaturization, kunye nokuthembeka okongeziweyo, zibenza balungele usetyenziso olwahlukeneyo. Uvakalelo lwabo oluphezulu lubavumela ukuba babone utshintsho loxinzelelo lwemizuzu, idizayini encinci ibenza ukuba bafanelekele izicelo eziphantsi kwendawo, kunye nokuthembeka okuphuculweyo kuqinisekisa ukusebenza okuzinzile kwexesha elide kwiindawo ezinzima.
Ngaba izivamvo zoxinzelelo lwefilim ezincinci zahluke njani kuluvo lwemveli?
Izinzwa zoxinzelelo lwefilim zichaneke ngakumbi, zicuthene, kwaye zihlala zihlala ixesha elide kunezoluvo ngobuninzi besintu. Banikezela ngentsebenzo engcono kwizicelo ezifunayo, bayakwazi ukusebenza ngaphakathi kuluhlu olubanzi lwamaqondo obushushu kunye noxinzelelo, kwaye banovakalelo oluphezulu kunye nesantya sokuphendula. Ezi mpawu zenza izinzwa zefilimu ezincinci zigqwese kwiinkqubo ezininzi ezifunwa kakhulu.
Ziziphi izinto ezisetyenziswa ngokuqhelekileyo kwiinzwa zoxinzelelo zefilimu?
Izinto eziqhelekileyo zibandakanya iintsimbi ezifana negolide kunye neplatinam, i-semiconductors efana nesilicon, kunye nezinto eziphambili ezifana negraphene. Igolide kunye neplatinam zisetyenziswa ngokubanzi kwi-conductivity yazo egqwesileyo kunye nokumelana nokugqwala kwi-electrode yenzwa. I-silicon isetyenziswa ngokuqhelekileyo kwiifilimu ezibhityileyo ze-semiconductor ngenxa yeempawu zayo ezintle zoomatshini kunye neempawu zombane, ngelixa igraphene ithathwa njengokhetho olufanelekileyo lwezixhobo zoluvo lwexesha elizayo ngenxa yeempawu zayo zombane ezibalaseleyo kunye namandla omatshini.
Ngawaphi amashishini azuza kakhulu kwizivavanyi zoxinzelelo lwefilimu ebhityileyo?
Iimoto, ezonyango, i-aerospace, i-elektroniki yabathengi, kunye nemizi-mveliso ye-automation ye-industrial ixhamla kakhulu kwi-sensors yoxinzelelo lwefilimu. Kwishishini leemoto, ezi zinzwa zisetyenziselwa ukujonga uxinzelelo lwetayara kunye nolawulo lwenjini; kwintsimi yezonyango, zisetyenziselwa ukubeka iliso kwixinzelelo lwegazi kunye ne-implantable sensors; kwicandelo le-aerospace, zisetyenziselwa ukujonga uxinzelelo lwekhabhinethi kunye nokubeka iliso kwisakhiwo sempilo; kwi-electronics yabathengi, baphucula amava omsebenzisi wezixhobo ezihlakaniphile; nakwimizi-mveliso ezenzekelayo, zisetyenziselwa ulawulo lwenkqubo kunye nerobhothi.
Zeziphi iindlela zokuvelisa ezisetyenziselwa izinzwa zoxinzelelo lwefilimu?
Ubuchule obuqhelekileyo bubandakanya ukutshiza, ukubekelwa umphunga kwikhemikhali (CVD), ukubekelwa umphunga womzimba (PVD), kunye ne-atomic layer deposition (ALD). Ezi ndlela zobuchule zinokulawula ngokuchanekileyo ubukhulu, ukufana, kunye nokubunjwa kwefilimu encinci, iqinisekisa ukusebenza kwenzwa kunye nokuthembeka. Ukutshiza yindlela esetyenziswa ngokubanzi yokubeka umphunga wokwenza iifilim ezibhityileyo zesinyithi; Iindlela ze-CVD kunye ne-PVD ziqhele ukusetyenziselwa ukubeka i-semiconductors kunye nezixhobo zokugquma; I-ALD inokulawula ubukhulu beefilimu ezincinci kwinqanaba le-athomu, ezifanelekileyo ukulungiselela iifilimu ezinqabileyo.
IiReferensi:
1.Ohring, M. (2001). "ISayensi yeMathiriyeli yeeFilimu eziNcinci." I-Academic Press.
Ixesha lokuposa: Jun-28-2024